Instrumented indentation, or nanoindentation, is an important technique used for measuring the mechanical properties of materials, and can be conducted in situ even on the circuit board itself. This ...

In digital circuits, insulating dielectrics separate the conducting parts (wire interconnects and transistors) from one another. As components have scaled down and transistors have gotten closer and ...

Nanoindentation is a method of measurement of the mechanical properties of small volumes of materials using an instrumented indentation technique. Elastic modulus, hardness, fracture toughness, creep ...

The exceptional sensitivity of atomic force microscopy and nanoindentation allows for the evaluation of minute displacements as low as the sub-nanometer system, allowing mechanical attributes (such as ...