San Jose, Calif. – July 13, 2009 – Novellus Systems (NASDAQ:NVLS) announced today that it has developed an advanced Hollow Cathode Magnetron (HCM®) IONXâ„¢ PVD copper seed process that will enable ...
SANTA CLARA, Calif. — Targeting next-generation copper interconnect processes, Applied Materials Inc. today (March 22) announced a chemical vapor deposition technology for titanium silicon nitride ...