Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...
Polynomial identities underpin a wide range of methods for analysing and solving differential equations arising in diverse scientific fields. Identities involving Bell polynomials, Stirling numbers ...
MUCH use is made in combinatorial problems of generating functions in the form of polynomials and infinite power series, these being obtained by the manipulation of other algebraic expressions. In ...